diff --git a/toolchain_ARMCLANG.cmake b/toolchain_ARMCLANG.cmake
index 92da833..964b032 100644
--- a/toolchain_ARMCLANG.cmake
+++ b/toolchain_ARMCLANG.cmake
@@ -332,6 +332,7 @@
         set_source_files_properties(${SCATTER_FILE_PATH}
             PROPERTIES
             LANGUAGE C
+            KEEP_EXTENSION True # Don't use .o extension for the preprocessed file
         )
     endforeach()
 
@@ -352,6 +353,11 @@
             -E
             -xc
     )
+
+    # Scatter file shall be preprocessed by manifest tool in isolation level 2,3
+    add_dependencies(${target}_scatter
+        manifest_tool
+    )
 endmacro()
 
 macro(add_convert_to_bin_target target)